Transmission Electron Microscope

Thermo Fisher Spectra 200

The state-of-the-art Thermo Fisher Scientific Spectra 200 microscope is an advanced scanning transmission electron microscopy (TEM/STEM) system equipped with an ultra-high-resolution cold-field emission (X-CFEG) electron gun. This source provides a highly coherent, intense electron beam with low energy dispersion (~0.4 eV), significantly improving spatial resolution and optimizing chemical analysis using EDS spectroscopy. Furthermore, it incorporates spherical aberration correction in the illumination system (Cs-corrected STEM), enabling subatomic resolution (down to 0.06 nm @ 200 kV) and atomic-resolution compositional analysis using energy-dispersive X-ray spectroscopy (EDS).

The system operates at acceleration voltages of 200 kV and 80 kV, the latter being especially suitable for characterizing samples sensitive to electron beam damage.

Technical specifications

• X-CFEG electronic source: System equipped with an ultra-high luminance cold field emission gun (X-CFEG), which provides a highly coherent, high current electron beam with low energy dispersion (<0.4 eV).
• Operating conditions: Equipment optimized to work at 200 kV and 80 kV, with a stabilization time of less than 5 minutes, guaranteeing high availability and operational efficiency.
• Aberration corrector (S-CORR): Probe aberration corrector up to the fifth order, which, combined with the X-CFEG source, allows STEM imaging with sub-angstrom resolution across the entire voltage range (80–200 kV).
• Spatial resolution in STEM: Resolution of 60 pm at 200 kV and 96 pm at 80 kV, allowing direct visualization of atomic structures with high precision.
• Segmented STEM detection system: New generation segmented detector (Panther STEM Detection System) with 16 segments, which allows simultaneous acquisition of multiple STEM signals (BF, DF, HAADF, ABF and DPC), providing complementary structural and functional information.
• Chemical analysis using Dual-X EDS: Dual-X EDS detection system with an effective solid angle of 1.7 sr, which allows for the acquisition of fast and quantitative compositional maps at the atomic scale.
• 4D-STEM Capability: Implementation of advanced 4D-STEM techniques for the acquisition of multidimensional datasets, facilitating the detailed analysis of structural and electronic properties.
• Software and user environment: The system has full versions of the control and analysis software, accessible from a dedicated workstation for users.